microfabrication

2 Articles

Up Close And Personal With A MEMS Microphone

December 20, 2023 by 14 Comments

If you’ve ever wondered what lies beneath the barely visible hole in the can of a MEMS microphone, you’re in luck, because [Zach Tong] has a $10 pair of earbuds to sacrifice for the cause and an electron microscope.

For the uninitiated, MEMS stands for microelectromechanical systems, the tiny silicon machines that power some of the more miraculous functions of smartphones and other modern electronics. The most familiar MEMS device might be the accelerometer that gives your phone a sense of where it is in space; [Zach] has a deep dive into MEMS accelerometers that we covered a while back.

MEMS microphones seem a little bit easier to understand mechanically, since all they have to do is change vibrations in air into an electrical signal. The microphone that [Zach] tore down for this video is ridiculously small; the SMD device is only about 3 mm long, with the MEMS chip under the can a fraction of a millimeter on a side. After some overall views with the optical microscope, [Zach] opened the can and put the guts under his scanning electron microscope. The SEM shots are pretty amazing, revealing a dimpled silicon diaphragm over a second layer with holes etched right through it. The dimples on the diaphragm nest into the holes, forming an air-dielectric capacitor whose capacitance varies as sound waves vibrate the diaphragm.

The most visually interesting feature, though, might be the deep cavity lying behind the two upper surfaces. The cavity, which [Zach] says bears evidence of having been etched by the deep reactive ion etching method, has cool-looking corrugations in its walls. The enormity of the cavity relative to the thin layers covering it suggests it’s a resonating cavity for the sound waves.

Thanks to [Zach] for this in-depth look at a device that’s amazingly complex yet remarkably simple.

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Scanning electron micrograph of a microfabricated lens array

Getting A Fly’s-Eye View With Microfabricated Lens Arrays

September 7, 2021 by 11 Comments

Atomic force microscopy, laser ablation, and etching with a witches brew of toxic chemicals: sounds like [Zachary Tong] has been playing in the lab again, and this time he found a way to fabricate arrays of microscopic lenses as a result.

Like many of the best projects, [Zach]’s journey into micro-fabrication started with a happy accident. It happened while he was working on metal-activated chemical etching (MACE), which uses a noble metal catalyst to selectively carve high-aspect-ratio features in silicon. After blasting at a silver-coated silicon wafer with a laser, he noticed the ablation pits were very smooth and uniform after etching. This led him to several hypotheses about what was going on, all of which he was able to test.

The experiments themselves are pretty interesting, but what’s really cool is that [Zach] realized the smooth hemispherical pits in the silicon could act as a mold for an array of microscopic convex lenses. He was able to deposit a small amount of clear silicone resin into the mold by spin-coating, and (eventually) transfer the microlens array to a glass slide. The lenses are impressively small — hundreds of them over only a couple hundred square microns — and pretty well-formed. There’s always room for improvement, of course, but for an initial attempt based on a serendipitous finding, we’d call it a win. As for what good these lenses are, your guess is as good as ours. But novel processes like these tend to find a way to be useful, and the fact that this is coming out of a home lab doesn’t change that fact.

We find this kind of micro-fabrication fascinating. Whether it’s making OLED displays, micro-machining glass with plasma, or even rolling your own semiconductors, we can’t get enough of this stuff.

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