Electron Beam Control In A Scanning Electron Microscope

Electron

A few years ago [Ben Krasnow] built a scanning electron microscope from a few parts he had sitting around. He’s done a few overviews of how he built his SEM, but now he’s put up a great video on how to control electrons, focus them into a point, and scan a sample.

The basic idea behind a scanning electron microscope is to shoot electrons down a tube, focus them into a point, and scan a conductive sample and detect the secondary electrons shot off the sample and display them on an oscilloscope. [Ben] is generating electrons with a small tungsten filament at the top of his electron ‘stack’. Being like charged, these electrons naturally fan out, so a good bit of electron optics are required to get a small point.

Focusing is done through a series of pinholes and electrostatic deflectors, much like you’d see in an old oscilloscope CRT. In the video, you can see [Ben] shooting electrons and displaying a Christmas tree graphic  onto a piece of phosphor-coated glass. He has a pretty big scanning area in his SEM, more than enough to look at a few chips, wafers, and whatever other crazy stuff is coming out of [Ben]‘s lab.

Video below, along with the three-year-old overview of the entire microscope.

Comments

  1. Sam says:

    http://benkrasnow.blogspot.com.au/2014/04/electron-beam-control-in-scanning.html

    At least jump to his blog for this, he deserves the traffic!

  2. Milo says:

    Very interesting, but now I’m half an hour late.

  3. Ken says:

    Brian Benchoff,
    Do you plan on posting instructions along with a parts list so someone like me can build one?

Leave a Reply

Fill in your details below or click an icon to log in:

WordPress.com Logo

You are commenting using your WordPress.com account. Log Out / Change )

Twitter picture

You are commenting using your Twitter account. Log Out / Change )

Facebook photo

You are commenting using your Facebook account. Log Out / Change )

Google+ photo

You are commenting using your Google+ account. Log Out / Change )

Connecting to %s

Follow

Get every new post delivered to your Inbox.

Join 93,826 other followers