scanning electron microscope

19 Articles

Converting A Scanning Electron Microscope Into A TEM Is Surprisingly Easy

June 13, 2026 by 6 Comments

Although both a SEM and a TEM are electron microscopes, their working principles and images are very different. Whereas an SEM uses secondary electrons ejected after bombarding a sample’s surface with primary electrons, a TEM works more like an X-ray machine, with a sensor placed behind the sample to record primary electrons after they pass through said sample. It is, however, possible to turn a SEM into a TEM with some creativity, as [ProjectsInFlight] recently did with his SEM.

We previously covered how the SEM in the video was saved from being scrapped and subsequently revived, and now it is getting a pretty nice upgrade. That said, this SEM to TEM change isn’t anything new, with so-called STEM imaging having been possible for ages using a rather simple reflecting adapter. The problem here is that such adapters cost enough to make you dread filing a budget request, yet they are simple enough that you might be able to DIY one.

The main concern with the DIY adapter was clearance between the sample holder and the fragile components inside the chamber. This turned out to be a hair under 14 mm (0.55″), giving not a lot of space to work with, but that was relative to the standard bulky sample holder. With a thinner sample plate machined out of aluminum, significantly more space became available, including for the primary electron mirror and shield for the secondary electrons.

Some more lathe, milling, and tapping work later, the entire sample holder came together. During testing a hack was implemented to enable adjusting the mirror angle while in the evacuated vacuum chamber so that the adapter could be dialed-in. Subsequently, a first sample was imagined in the form of gold nanoparticles, which revealed a leaky secondary electron shield due to bypassing.

Further testing revealed that the shield needed to extend much higher to meaningfully block secondary electrons, after which the TEM image massively improved. Subsequently, a previously expired mosquito graciously donated its wings to science, with TEM imaging clearly revealing the delicate structures within these wonders of evolutionary design.

The next challenge will be to TEM image biological cells, which require substantial preparation.

This isn’t the first STEM converter we’ve seen. The SEM has a long checkered history that we’ve talked about before, too.

Continue reading “Converting A Scanning Electron Microscope Into A TEM Is Surprisingly Easy” →

The green CRT display of a scanning-electron microscope is shown, displaying small particles.

DIY Calibration Target For Electron Microscopes

June 12, 2025 by 3 Comments

It’s a problem that few of us will ever face, but if you ever have to calibrate your scanning electron microscope, you’ll need a resolution target with a high contrast under an electron beam. This requires an extremely small pattern of alternating high and low-density materials, which [ProjectsInFlight] created in his latest video by depositing gold nanoparticles on a silicon slide.

[ProjectsInFlight]’s scanning electron microscope came from a lab that discarded it as nonfunctional, and as we’ve seen before, he’s since been getting it back into working condition. When it was new, it could magnify 200,000 times and resolve features of 5.5 nm, and a resolution target with a range of feature sizes would indicate how high a magnification the microscope could still reach. [ProjectsInFlight] could also use the target to make before-and-after comparisons for his repairs, and to properly adjust the electron beam.

Since it’s easy to get very flat silicon wafers, [ProjectsInFlight] settled on these as the low-density portion of the target, and deposited a range of sizes of gold nanoparticles onto them as the high-density portion. To make the nanoparticles, he started by dissolving a small sample of gold in aqua regia to make chloroauric acid, then reduced this back to gold nanoparticles using sodium citrate. This gave particles in the 50-100 nanometer range, but [ProjectsInFlight] also needed some larger particles. This proved troublesome for a while, until he learned that he needed to cool the reaction temperature solution to near freezing before making the nanoparticles.

Using these particles, [ProjectsInFlight] was able to tune the astigmatism settings on the microscope’s electron beam so that it could clearly resolve the larger particles, and just barely see the smaller particles – quite an achievement considering that they’re under 100 nanometers across!

Electron microscopes are still a pretty rare build, but not unheard-of. If you ever find one that’s broken, it could be a worthwhile investment.

Continue reading “DIY Calibration Target For Electron Microscopes” →

Homebrew Electron Beam Lithography With A Scanning Electron Microscope

December 19, 2024 by 8 Comments

If you want to build semiconductors at home, it seems like the best place to start might be to find a used scanning electron microscope on eBay. At least that’s how [Peter Bosch] kicked off his electron beam lithography project, and we have to say the results are pretty impressive.

Now, most of the DIY semiconductor efforts we’ve seen start with photolithography, where a pattern is optically projected onto a substrate coated with a photopolymer resist layer so that features can be etched into the surface using various chemical treatments. [Peter]’s method is similar, but with important differences. First, for a resist he chose poly-methyl methacrylate (PMMA), also known as acrylic, dissolved in anisole, an organic substance commonly used in the fragrance industry. The resist solution was spin-coated into a test substrate of aluminized Mylar before going into the chamber of the SEM.

As for the microscope itself, that required a few special modifications of its own. Rather than rastering the beam across his sample and using a pattern mask, [Peter] wanted to draw the pattern onto the resist-covered substrate directly. This required an external deflection modification to the SEM, which we’d love to hear more about. Also, the SEM didn’t support beam blanking, meaning the electron beam would be turned on even while moving across areas that weren’t to be exposed. To get around this, [Peter] slowed down the beam’s movements while exposing areas in the pattern, and sped it up while transitioning to the next feature. It’s a pretty clever hack, and after development and etching with a cocktail of acids, the results were pretty spectacular. Check it out in the video below.

It’s pretty clear that this is all preliminary work, and that there’s much more to come before [Peter] starts etching silicon. He says he’s currently working on a thermal evaporator to deposit thin films, which we’re keen to see. We’ve seen a few sputtering rigs for thin film deposition before, but there are chemical ways to do it, too.

Continue reading “Homebrew Electron Beam Lithography With A Scanning Electron Microscope” →

Saving An Electron Microscope From The Trash

December 13, 2024 by 17 Comments

Who wouldn’t want to have a scanning electron microscope (SEM)? If you’re the person behind the ProjectsInFlight channel on YouTube, you certainly do. In a recent video it’s explained how he got his mittens on a late 1980s, early 1990s era JEOL JSM-5200 SEM that was going to be scrapped. This absolute unit of a system comes with everything that’s needed to do the imaging, processing and displaying on the small CRT. The only problem with it was that it was defective, deemed irreparable and hence the reason why it was headed to the scrap. Could it still be revived against all odds?

The JEOL JSM-5200 SEM after being revived and happily scanning away. (Credit: ProjectsInFlight, YouTube)

The good news was that the unit came with the manual and schematics, and it turns out there’s an online SEM community of enthusiasts who are more than happy to help each other out. One of these even had his own JSM-5200 which helped with comparing the two units when something wasn’t working. Being an SEM, the sample has to be placed in a high vacuum, which takes a diffusion vacuum pump, which itself requires a second vacuum pump, all of which requires voltages and electronics before even getting to the amplification circuitry.

Since the first problem was that this salvaged unit wasn’t turning on, it started with the power supply and a blown fuse. This led to a shorted transformer, bad DC-DC converters, a broken vacuum pump, expired rubber hoses and seals, and so on, much of which can be attributed simply to the age of the machine. Finding direct replacements was often simply impossible to very expensive, necessitating creative solutions along with significant TLC.

Although there are still some small issues with for example the CRT due to possibly bad capacitors, overall the SEM seems to be in working condition now, which is amazing for a unit that was going to be trashed.

Thanks to [Hans] for the tip.

Continue reading “Saving An Electron Microscope From The Trash” →

What You Can See With A SEM?

June 19, 2024 by 4 Comments

The last time we used a scanning electron microscope (a SEM), it looked like something from a bad 1950s science fiction movie. These days SEMs, like the one at the IBM research center, look like computers with a big tank poised nearby. Interestingly, the SEM is so sensitive that it has to be in a quiet room to prevent sound from interfering with images.

As a demo of the machine’s impressive capability, [John Ott] loads two US pennies, one facing up and one face down. [John] notes that Lincoln appears on both sides of the penny and then proves the assertion correct using moderate magnification under the electron beam.

Continue reading “What You Can See With A SEM?” →

How We Got The Scanning Electron Microscope

May 8, 2024 by 11 Comments

According to [Asianometry], no one believed in the scanning electron microscope. No one, that is, except [Charles Oatley].The video below tells the whole story.

The Cambridge graduate built radios during World War II and then joined Cambridge as a lecturer once the conflict was over. [Hans Busch] demonstrated using magnets to move electron beams, which suggested the possibility of creating a lens, and it was an obvious thought to make a microscope that uses electrons.

After all, electrons can have smaller wavelength than light, so a microscope using electrons could — in theory — image at a higher resolution. [Max Knoll] and [Ernst Ruska], in fact, developed the transmission electron microscope or TEM.

Continue reading “How We Got The Scanning Electron Microscope” →

Viewing Atoms With Electrons

July 5, 2022 by 9 Comments

When we were in school, they always told us we can’t see atoms. If you have an electron microscope, then they were wrong. [AlphaPhoenix] has access to a scanning tunneling transmission electron microscope and he shows us some atoms in a very thin slice of a crystal.

Of course, you aren’t directly imaging the atoms. You are looking at the shadows of the atoms, but still. If you’ve never worked with a SEM or STEM before, there are plenty of little details that are interesting like the sample holders and the vacuum system.

Continue reading “Viewing Atoms With Electrons” →