Homebrew Electron Beam Lithography With A Scanning Electron Microscope

December 19, 2024 by Dan Maloney 7 Comments

If you want to build semiconductors at home, it seems like the best place to start might be to find a used scanning electron microscope on eBay. At least that’s how [Peter Bosch] kicked off his electron beam lithography project, and we have to say the results are pretty impressive.

Now, most of the DIY semiconductor efforts we’ve seen start with photolithography, where a pattern is optically projected onto a substrate coated with a photopolymer resist layer so that features can be etched into the surface using various chemical treatments. [Peter]’s method is similar, but with important differences. First, for a resist he chose poly-methyl methacrylate (PMMA), also known as acrylic, dissolved in anisole, an organic substance commonly used in the fragrance industry. The resist solution was spin-coated into a test substrate of aluminized Mylar before going into the chamber of the SEM.

As for the microscope itself, that required a few special modifications of its own. Rather than rastering the beam across his sample and using a pattern mask, [Peter] wanted to draw the pattern onto the resist-covered substrate directly. This required an external deflection modification to the SEM, which we’d love to hear more about. Also, the SEM didn’t support beam blanking, meaning the electron beam would be turned on even while moving across areas that weren’t to be exposed. To get around this, [Peter] slowed down the beam’s movements while exposing areas in the pattern, and sped it up while transitioning to the next feature. It’s a pretty clever hack, and after development and etching with a cocktail of acids, the results were pretty spectacular. Check it out in the video below.

It’s pretty clear that this is all preliminary work, and that there’s much more to come before [Peter] starts etching silicon. He says he’s currently working on a thermal evaporator to deposit thin films, which we’re keen to see. We’ve seen a few sputtering rigs for thin film deposition before, but there are chemical ways to do it, too.

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Saving An Electron Microscope From The Trash

December 13, 2024 by Maya Posch 17 Comments

Who wouldn’t want to have a scanning electron microscope (SEM)? If you’re the person behind the ProjectsInFlight channel on YouTube, you certainly do. In a recent video it’s explained how he got his mittens on a late 1980s, early 1990s era JEOL JSM-5200 SEM that was going to be scrapped. This absolute unit of a system comes with everything that’s needed to do the imaging, processing and displaying on the small CRT. The only problem with it was that it was defective, deemed irreparable and hence the reason why it was headed to the scrap. Could it still be revived against all odds?

The JEOL JSM-5200 SEM after being revived and happily scanning away. (Credit: ProjectsInFlight, YouTube)

The good news was that the unit came with the manual and schematics, and it turns out there’s an online SEM community of enthusiasts who are more than happy to help each other out. One of these even had his own JSM-5200 which helped with comparing the two units when something wasn’t working. Being an SEM, the sample has to be placed in a high vacuum, which takes a diffusion vacuum pump, which itself requires a second vacuum pump, all of which requires voltages and electronics before even getting to the amplification circuitry.

Since the first problem was that this salvaged unit wasn’t turning on, it started with the power supply and a blown fuse. This led to a shorted transformer, bad DC-DC converters, a broken vacuum pump, expired rubber hoses and seals, and so on, much of which can be attributed simply to the age of the machine. Finding direct replacements was often simply impossible to very expensive, necessitating creative solutions along with significant TLC.

Although there are still some small issues with for example the CRT due to possibly bad capacitors, overall the SEM seems to be in working condition now, which is amazing for a unit that was going to be trashed.

Thanks to [Hans] for the tip.

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What You Can See With A SEM?

June 19, 2024 by Al Williams 4 Comments

The last time we used a scanning electron microscope (a SEM), it looked like something from a bad 1950s science fiction movie. These days SEMs, like the one at the IBM research center, look like computers with a big tank poised nearby. Interestingly, the SEM is so sensitive that it has to be in a quiet room to prevent sound from interfering with images.

As a demo of the machine’s impressive capability, [John Ott] loads two US pennies, one facing up and one face down. [John] notes that Lincoln appears on both sides of the penny and then proves the assertion correct using moderate magnification under the electron beam.

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How We Got The Scanning Electron Microscope

May 8, 2024 by Al Williams 11 Comments

According to [Asianometry], no one believed in the scanning electron microscope. No one, that is, except [Charles Oatley].The video below tells the whole story.

The Cambridge graduate built radios during World War II and then joined Cambridge as a lecturer once the conflict was over. [Hans Busch] demonstrated using magnets to move electron beams, which suggested the possibility of creating a lens, and it was an obvious thought to make a microscope that uses electrons.

After all, electrons can have smaller wavelength than light, so a microscope using electrons could — in theory — image at a higher resolution. [Max Knoll] and [Ernst Ruska], in fact, developed the transmission electron microscope or TEM.

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Viewing Atoms With Electrons

July 5, 2022 by Al Williams 9 Comments

When we were in school, they always told us we can’t see atoms. If you have an electron microscope, then they were wrong. [AlphaPhoenix] has access to a scanning ~~tunneling~~ transmission electron microscope and he shows us some atoms in a very thin slice of a crystal.

Of course, you aren’t directly imaging the atoms. You are looking at the shadows of the atoms, but still. If you’ve never worked with a SEM or STEM before, there are plenty of little details that are interesting like the sample holders and the vacuum system.

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Home Made Scanning Electron Microscope Shows Some Potential

March 21, 2022 by Dave Rowntree 7 Comments

Scanning electron microscopes are one of those niche instruments that most of us don’t really need all the time, but would still love to have access to once in a while. Although we’ve covered a few attempts at home-builds before, many have faltered, except this project over on Hackday.IO by user Vini’s Lab, which appears to be still under active development. The principle of the SEM is pretty simple; a specially prepared sample is bombarded with a focussed beam of electrons, that is steered in a raster pattern. A signal is acquired, using one of a number of techniques, such as secondary electrons (SE) back-scattered electrons (BSE) or simply the transmitted current into the sample. This signal can then be used to form an image of the sample or gather other properties.

The project is clearly in the early stages, as the author says, it’s a very costly thing to build, but already some of the machined parts are ready for assembly. Work has started on the drive electronics for the condenser stigmator. This part of the instrument takes the central part of the rapidly diverging raw electron beam that makes it through the anode, and with a couple of sets of octopole coil sets, and an aperture or two, selects only the central portion of the beam, as well as correcting for any astigmatism in the beam. By adjusting the relative currents through each of the coils, a quadrupole magnetic field is created, which counteracts the beam asymmetry.

Scanning control and signal acquisition are handled by a single dedicated card, which utilises the PIO function of a Raspberry Pi Pico module. The Pico can drive the scanning operation, and with an external FTDI USB3.0 device, send four synchronised channels of acquired sample data back to the host computer. Using PCIe connectors and mating edge connectors on the cards, gives a robust and cost effective physical connection. As can be seen from the project page, a lot of mechanical design is complete, and machining has started, so this is a project to keep an eye on in the coming months, and possibly years!

We have seen a few SEM hacks, here’s a teensy powered SEM hack from [Ben Krasnow] and here’s another attempt. For such a conceptually simple device, with such immense usefulness, its does seem a bit remiss that there aren’t more such projects out there.

Electron Microscopes Are Awesome: Everything You Didn’t Know You Wanted To Know

February 18, 2019 by Mike Szczys 15 Comments

Electron microscopes were once the turf of research laboratories that could foot the hefty bill of procuring and maintaining such equipment. But old models have been finding their way into the hands of eager individuals who are giving us an inside look at the rare equipment. Before you start scouring Craigslist, go on a crash course of what you need to know with Adam McComb’s Hacker’s Guide to Electron Microscopy. He presented the talk at the 2018 Hackaday Superconference and the recording was just published, you’ll find it below.

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