fluorine

3 Articles

Mining And Refining: The Halogens

January 21, 2025 by 14 Comments

I was looking at the periodic table of the elements the other day, as one does, when my eye fell upon the right-hand side of the chart. Right next to the noble gases at the extreme edge of the table is a column of elements with similar and interesting properties: the halogens. Almost all of these reactive elements are pretty familiar, especially chlorine, which most of us eat by the gram every day in the form of table salt. As the neighborhoods of the periodic table go, Group 17 is pretty familiar territory.

But for some reason, one member of this group caught my attention: iodine. I realized I had no idea where we get iodine, which led to the realization that apart from chlorine, I really didn’t know where any of the halogens came from. And as usual, that meant I needed to dig in and learn a little bit about the mining and refining of the halogens. At least most of them; as interesting as they may be, we’ll be skipping the naturally occurring but rare and highly radioactive halogen astatine, as well as the synthetic halogen tennessine, which lives just below it in the group.

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Big Chemistry: Hydrofluoric Acid

February 27, 2024 by 32 Comments

For all of the semiconductor industry’s legendary reputation for cleanliness, the actual processes that go into making chips use some of the nastiest stuff imaginable. Silicon oxide is comes from nothing but boring old sand, and once it’s turned into ultrapure crystals and sliced into wafers, it still doesn’t do much. Making it into working circuits requires dopants like phosphorous and boron to give the silicon the proper semiconductor properties. But even then, a doped wafer doesn’t do much until an insulating layer of silicon dioxide is added and the unwanted bits are etched away. That’s a tall order, though; silicon dioxide is notoriously tough stuff, largely unreactive and therefore resistant to most chemicals. Only one substance will do the job: hydrofluoric acid, or HFA.

HFA has a bad reputation, and deservedly so, notwithstanding its somewhat overwrought treatment by Hollywood. It’s corrosive to just about everything, it’s extremely toxic, and if enough of it gets on your skin it’ll kill you slowly and leave you in agony the entire time. But it’s also absolutely necessary to make everything from pharmaceuticals to cookware, and it takes some big chemistry to do it safely and cheaply.

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Garage Semiconductor Fab Gets Reactive-Ion Etching Upgrade

June 29, 2021 by 21 Comments

It’s a problem that few of us will likely ever face: once you’ve built your first homemade integrated circuit, what do you do next? If you’re [Sam Zeloof], the answer is clear: build better integrated circuits.

At least that’s [Sam]’s plan, which his new reactive-ion etching setup aims to make possible. While his Z1 dual differential amplifier chip was a huge success, the photolithography process he used to create the chip had its limitations. The chemical etching process he used is a bit fussy, and prone to undercutting of the mask if the etchant seeps underneath it. As its name implies, RIE uses a plasma of highly reactive ions to do the etching instead, resulting in finer details and opening the door to using more advanced materials.

[Sam]’s RIE rig looks like a plumber’s stainless steel nightmare, in the middle of which sits a vacuum chamber for the wafer to be etched. After evacuating the air, a small amount of fluorinated gas — either carbon tetrafluoride or the always entertaining sulfur hexafluoride — is added to the chamber. A high-voltage feedthrough provides the RF energy needed to create a plasma, which knocks fluorine ions out of the process gas. The negatively charged and extremely reactive fluorine ions are attracted to the wafer, where they attack and etch away the surfaces that aren’t protected by a photoresist layer.

It all sounds simple enough, but the video below reveals the complexity. There are a lot of details, like correctly measuring vacuum, avoiding electrocution, keeping the vacuum pump oil from exploding, and dealing with toxic waste products. Hats off to [Sam’s dad] for pitching in to safely pipe the exhaust gases through the garage door. This ties with [Huygens Optics]’s latest endeavor for the “coolest things to do with fluorine” award.

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