Homebrew Electron Beam Lithography With A Scanning Electron Microscope

December 19, 2024 by Dan Maloney 7 Comments

If you want to build semiconductors at home, it seems like the best place to start might be to find a used scanning electron microscope on eBay. At least that’s how [Peter Bosch] kicked off his electron beam lithography project, and we have to say the results are pretty impressive.

Now, most of the DIY semiconductor efforts we’ve seen start with photolithography, where a pattern is optically projected onto a substrate coated with a photopolymer resist layer so that features can be etched into the surface using various chemical treatments. [Peter]’s method is similar, but with important differences. First, for a resist he chose poly-methyl methacrylate (PMMA), also known as acrylic, dissolved in anisole, an organic substance commonly used in the fragrance industry. The resist solution was spin-coated into a test substrate of aluminized Mylar before going into the chamber of the SEM.

As for the microscope itself, that required a few special modifications of its own. Rather than rastering the beam across his sample and using a pattern mask, [Peter] wanted to draw the pattern onto the resist-covered substrate directly. This required an external deflection modification to the SEM, which we’d love to hear more about. Also, the SEM didn’t support beam blanking, meaning the electron beam would be turned on even while moving across areas that weren’t to be exposed. To get around this, [Peter] slowed down the beam’s movements while exposing areas in the pattern, and sped it up while transitioning to the next feature. It’s a pretty clever hack, and after development and etching with a cocktail of acids, the results were pretty spectacular. Check it out in the video below.

It’s pretty clear that this is all preliminary work, and that there’s much more to come before [Peter] starts etching silicon. He says he’s currently working on a thermal evaporator to deposit thin films, which we’re keen to see. We’ve seen a few sputtering rigs for thin film deposition before, but there are chemical ways to do it, too.

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Up Close And Personal With A MEMS Microphone

December 20, 2023 by Dan Maloney 14 Comments

If you’ve ever wondered what lies beneath the barely visible hole in the can of a MEMS microphone, you’re in luck, because [Zach Tong] has a $10 pair of earbuds to sacrifice for the cause and an electron microscope.

For the uninitiated, MEMS stands for microelectromechanical systems, the tiny silicon machines that power some of the more miraculous functions of smartphones and other modern electronics. The most familiar MEMS device might be the accelerometer that gives your phone a sense of where it is in space; [Zach] has a deep dive into MEMS accelerometers that we covered a while back.

MEMS microphones seem a little bit easier to understand mechanically, since all they have to do is change vibrations in air into an electrical signal. The microphone that [Zach] tore down for this video is ridiculously small; the SMD device is only about 3 mm long, with the MEMS chip under the can a fraction of a millimeter on a side. After some overall views with the optical microscope, [Zach] opened the can and put the guts under his scanning electron microscope. The SEM shots are pretty amazing, revealing a dimpled silicon diaphragm over a second layer with holes etched right through it. The dimples on the diaphragm nest into the holes, forming an air-dielectric capacitor whose capacitance varies as sound waves vibrate the diaphragm.

The most visually interesting feature, though, might be the deep cavity lying behind the two upper surfaces. The cavity, which [Zach] says bears evidence of having been etched by the deep reactive ion etching method, has cool-looking corrugations in its walls. The enormity of the cavity relative to the thin layers covering it suggests it’s a resonating cavity for the sound waves.

Thanks to [Zach] for this in-depth look at a device that’s amazingly complex yet remarkably simple.

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Getting A Close-Up View Of Chip Formation With An SEM

June 1, 2023 by Dan Maloney 16 Comments

When all you’ve got is a hammer, everything looks like a nail. And when you’ve got a scanning electron microscope, everything must look like a sample that would be really, really interesting to see enlarged in all its 3D glory. And this is what [Zachary Tong] delivers with this up close and personal look at the chip formation process.

We’ve got to hand it to [Zach] with this one, because it seems like this was one of those projects that just fought back the whole time. Granted, the idea of cutting metal inside the vacuum chamber of an SEM seems like quite an undertaking right up front. To accomplish this, [Zach] needed to build a custom tool to advance a cutting edge into a piece of stock by tiny increments. His starting point was a simple off-the-shelf linear stage, which needed a lot of prep work before going into the SEM vacuum chamber. The stage’s micrometer advances a carbide insert into a small piece of aluminum 50 microns at a time, raising a tiny sliver of aluminum while it slowly plows a tiny groove into the workpiece.

Getting the multiple shots required to make a decent animation with this rig was no mean feat. [Zach]’s SEM sample chamber doesn’t have any electrical connections, so each of the 159 frames required a painstaking process of advancing the tool, pulling down a vacuum in the chamber, and taking a picture. With each frame taking at least five minutes, this was clearly a labor of love. The results are worth it, though; stitched together, the electron micrographs show the chip formation process in amazing detail. The aluminum oxide layer on the top of the workpiece is clearly visible, as are the different zones of cutting action. The grain of the metal is also clearly visible, and the “gumminess” of the chip is readily apparent too.

For as much work as this was, it seems like [Zach] had things a bit easier than [Ben Krasnow] did when he tried something similar with a much less capable SEM.

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Building An Electron Microscope For Research

April 14, 2023 by Bryan Cockfield 10 Comments

There are a lot of situations where a research group may turn to an electron microscope to get information about whatever system they might be studying. Assessing the structure of a virus or protein, analyzing the morphology of a new nanoparticle, or examining the layout of a semiconductor all might require the use of one of these devices. But if your research involves the electron microscope itself, you might be a little more reluctant to tear down these expensive devices to take a look behind the curtain as the costs to do this for more than a few could quickly get out of hand. That’s why this research group has created their own electron detector.

Specifically, the electron detector is designed for use in a scanning electron microscope, which is typically used for inspecting the surface of a sample and retrieving a high-resolution, 3D image of it compared to transmission microscopes which can probe internal structures. The detector is built on a four-layer PCB which includes the photodiode sensing array, a series of amplifiers, and a power supply. All of the circuit diagrams and schematics are available for inspection as well thanks to the design being licensed under the open Creative Commons license. For any research team looking to build this, a bill of materials is also included, as is a set of build instructions.

While this is only one piece of the puzzle surrounding the setup and operation of an electron microscope, its arguably the most important, and also greatly lowers the barrier of entry for anyone looking to analyze electron microscope design themselves. With an open standard, anyone is free to modify or augment this design as they see fit which is a marked improvement over the closed and expensive proprietary microscopes out there. And, if low-cost microscopes are your thing be sure to check out this fluorescence microscope we featured that uses readily-available parts to dramatically lower the cost compared to commercial offerings.

Hackaday Links: June 12, 2022

June 12, 2022 by Dan Maloney 4 Comments

“Don’t worry, that’ll buff right out.” Alarming news this week as the James Webb Space Telescope team announced that a meteoroid had hit the space observatory’s massive primary mirror. While far from unexpected, the strike on mirror segment C3 (the sixth mirror from the top going clockwise, roughly in the “south southeast” position) that occurred back in late May was larger than any of the simulations or test strikes performed on Earth prior to launch. It was also not part of any known meteoroid storm in the telescope’s orbit; if it had been, controllers would have been able to maneuver the spacecraft to protect the gold-plated beryllium segments. The rogue space rock apparently did enough damage to be noticeable in the data coming back from the telescope and to require adjustment to the position of the mirror segment. While it certainly won’t be the last time this happens, it would have been nice to see one picture from Webb before it started accumulating hits.

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Home Made Scanning Electron Microscope Shows Some Potential

March 21, 2022 by Dave Rowntree 7 Comments

Scanning electron microscopes are one of those niche instruments that most of us don’t really need all the time, but would still love to have access to once in a while. Although we’ve covered a few attempts at home-builds before, many have faltered, except this project over on Hackday.IO by user Vini’s Lab, which appears to be still under active development. The principle of the SEM is pretty simple; a specially prepared sample is bombarded with a focussed beam of electrons, that is steered in a raster pattern. A signal is acquired, using one of a number of techniques, such as secondary electrons (SE) back-scattered electrons (BSE) or simply the transmitted current into the sample. This signal can then be used to form an image of the sample or gather other properties.

The project is clearly in the early stages, as the author says, it’s a very costly thing to build, but already some of the machined parts are ready for assembly. Work has started on the drive electronics for the condenser stigmator. This part of the instrument takes the central part of the rapidly diverging raw electron beam that makes it through the anode, and with a couple of sets of octopole coil sets, and an aperture or two, selects only the central portion of the beam, as well as correcting for any astigmatism in the beam. By adjusting the relative currents through each of the coils, a quadrupole magnetic field is created, which counteracts the beam asymmetry.

Scanning control and signal acquisition are handled by a single dedicated card, which utilises the PIO function of a Raspberry Pi Pico module. The Pico can drive the scanning operation, and with an external FTDI USB3.0 device, send four synchronised channels of acquired sample data back to the host computer. Using PCIe connectors and mating edge connectors on the cards, gives a robust and cost effective physical connection. As can be seen from the project page, a lot of mechanical design is complete, and machining has started, so this is a project to keep an eye on in the coming months, and possibly years!

We have seen a few SEM hacks, here’s a teensy powered SEM hack from [Ben Krasnow] and here’s another attempt. For such a conceptually simple device, with such immense usefulness, its does seem a bit remiss that there aren’t more such projects out there.

Electron Microscopes Are Awesome: Everything You Didn’t Know You Wanted To Know

February 18, 2019 by Mike Szczys 15 Comments

Electron microscopes were once the turf of research laboratories that could foot the hefty bill of procuring and maintaining such equipment. But old models have been finding their way into the hands of eager individuals who are giving us an inside look at the rare equipment. Before you start scouring Craigslist, go on a crash course of what you need to know with Adam McComb’s Hacker’s Guide to Electron Microscopy. He presented the talk at the 2018 Hackaday Superconference and the recording was just published, you’ll find it below.

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